| 纳米多孔二氧化硅绝热薄膜的研究进展 |
| |
| 引用本文： | 赵宗彦,柳清菊,张瑾,朱忠其. 纳米多孔二氧化硅绝热薄膜的研究进展[J]. 功能材料, 2006, 37(12): 1859-1863 |
| |
| 作者姓名： | 赵宗彦 柳清菊 张瑾 朱忠其 |
| |
| 作者单位： | 云南大学,材料科学与工程系,云南,昆明,650091;云南大学,材料科学与工程系,云南,昆明,650091;云南大学,材料科学与工程系,云南,昆明,650091;云南大学,材料科学与工程系,云南,昆明,650091 |
| |
| 基金项目： | 教育部跨世纪优秀人才培养计划 , 云南省应用基础研究计划 |
| |
| 摘 要： | 作为微电子机械系统(MEMS)技术中最有潜力的绝热材料,纳米多孔二氧化硅薄膜近年来引起了广泛的关注.研究表明其绝热性能与微观结构密切相关.综述了纳米多孔二氧化硅薄膜的制备方法、表征手段和绝热机理,并讨论了目前存在的一些问题和今后的发展方向.
|
| 关 键 词： | 纳米多孔二氧化硅薄膜 绝热材料 绝热机理 |
| 文章编号： | 1001-9731(2006)12-1859-05 |
| 收稿时间： | 2006-06-13 |
| 修稿时间： | 2006-09-05 |
Development of nanoporous silica thermal insulating films |
| |
| ZHAO Zong-yan,LIU Qing-ju,ZHANG Jing,ZHU Zhong-qi. Development of nanoporous silica thermal insulating films[J]. Journal of Functional Materials, 2006, 37(12): 1859-1863 |
| |
| Authors: | ZHAO Zong-yan LIU Qing-ju ZHANG Jing ZHU Zhong-qi |
| |
| Affiliation: | Department of Material Science and Engineering, Yunnan University, Kunming 650091, China |
| |
| Abstract: | As the most potential thermal insulating material in the MEMS technology, nanoporous silica film has attracted widespread attention. The research has indicated that its property of thermal insulation is directly related to its microstructure. This paper has summarized the advances in preparation, characterization and thermal insulating mechanism. Finally, the present problems and development direction in the future were pointed out. |
| |
| Keywords: | nanoporous silica films thermal insulating materials thermal insulating mechanism |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
