| 高速InP基半导体电光调制器行波电极结构研究 |
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| 引用本文： | 郭丽丽,孙长征,熊兵,罗毅.高速InP基半导体电光调制器行波电极结构研究[J].半导体光电,2012,33(6):791-794. |
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| 作者姓名： | 郭丽丽 孙长征 熊兵 罗毅 |
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| 作者单位： | 清华大学信息科学与技术国家实验室（筹）,北京,100084;清华大学信息科学与技术国家实验室（筹）,北京,100084;清华大学信息科学与技术国家实验室（筹）,北京,100084;清华大学信息科学与技术国家实验室（筹）,北京,100084 |
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| 基金项目： | 国家“973”计划项目（2012CB315605, 2011CB301900）；国家 “863” 计划项目（2011AA03A112, 2011AA03A106, 2011AA03A105）；国家科技支撑计划（2011BAE01B07）；国家自然科学基金项目（61176015, 60723002, 61176059, 60977022, 51002085）；北京市自然科学基金项目（4091001）. |
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| 摘 要： | 对PIN型和NIN型两种InP基Mach-Zehnder电光调制器的电极结构进行了数值仿真研究,从而确定出适于这两种电光调制器的行波电极结构。仿真结果表明,NIN型电光调制器可采用简单的单臂类微带电极,而PIN型电光调制器需采用周期容性负载电极,以达到良好的阻抗匹配特性和传输特性。进一步地,提出了将串联推挽式行波电极结构应用于PIN型电光调制器,可以简化制作工艺并获得良好的微波特性。
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| 关 键 词： | 电光调制器 行波电极 阻抗匹配 微波损耗 |
| 收稿时间： | 2012/4/16 0:00:00 |
Design of Traveling-wave Electrodes for High-speed InP-based Semiconductor Electro-optic Modulators |
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| GUO Lili,SUN Changzheng,XIONG Bing and LUO Yi.Design of Traveling-wave Electrodes for High-speed InP-based Semiconductor Electro-optic Modulators[J].Semiconductor Optoelectronics,2012,33(6):791-794. |
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| Authors: | GUO Lili SUN Changzheng XIONG Bing and LUO Yi |
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| Affiliation: | Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, CHN;Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, CHN;Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, CHN;Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, CHN |
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| Abstract: | Traveling-wave electrode configurations suitable for PIN- and NIN-type InP-based Mach-Zehnder electro-optic modulators are studied through numerical simulations. The results indicate that good microwave performance can be secured for NIN-type modulator with microstrip electrodes and PIN-type modulator with capacitively-loaded traveling-wave electrodes. Meanwhile, a series push-pull electrode for PIN-type modulator is proposed to simplify the fabrication process as well as improving the microwave performance. |
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| Keywords: | electro-optic modulator traveling-wave electrode impedance matching microwave loss |
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