Miniature all-fiber Fabry-Perot sensor for simultaneous measurement of pressure and temperature

This article presents a miniature, high-sensitivity, all-silica Fabry-Perot fiber-optic sensor suitable for simultaneous measurements of pressure and temperature. The proposed sensor diameter does not exceed 125 μm and consists of two low-finesse Fabry-Perot resonators created at the tip of an optical fiber. The first resonator is embodied in the form of a short air cavity positioned at the tip of the fiber. This resonator utilizes a thin silica diaphragm to achieve the sensor's pressure response. The second resonator exploits the refractive index dependence of silica fiber in order to provide the proposed sensor's temperature measurement function. Both resonators have substantially different lengths that permit straightforward spectrally resolved signal processing and unambiguous determination of the applied pressure and temperature.