合肥同步辐射反射率测量装置

分析设计并研制了同步辐射计量光束线的反射率计系统.该反射率计工作波长5～100nm,角分辨率0.005°,样品台可做六维调整,样品与探测器采用同轴扫描馈入机构,大大提高了扫描运动及测量精度.样品和探测器均具有平移和旋转两种功能,并且既可独立运动,又可θ-2θ同步联动,样品和探测器均可退出光路,通过束线差分系统和反射率计差分馈入系统可充分保证10^-6～10^-8Torr的真空度.对样品的反射率测试可分波长扫描和角度扫描两种方式.

Reflectivity measuring device the in national synchrotron radiation laborator

The reflectometer in the National Synchrotron Radiation Laboator(NSRL)radiometry metrology experimental station was designed and developed. The wavelengh range is 500～100 nm,and the angle differentiate is 0.005°. Sample table can be adjusted six dimensions. The together-axis feed-through is employed by sample scanner and detector scanner,so that the scan precision of movement and measurement are improved greatly. The sample and detector can both move and rotate, not only rotating singly but also together at θ-2θ angle, and they can exit from light path. By using beamline difference system and reflectometer difference feed-through system, 10^-6～10^-8 Torr vacuum is obtainable. The sample reflectivity can be measured by wavelengh scan and angle scan.