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Growth of β-Ga2O3 nanocolumns crossing perpendicularly each other on MgO (1 0 0) surface
Authors:Kyoko Hori  Masahiro Fukuta  Hirokazu Shimooka  Shigemi Kohiki  Toetsu Shishido  Masaoki Oku  Masanori Mitome  Yoshio Bando
Affiliation:

aDepartment of Materials Science, Kyushu Institute of Technology, 1-1 Sensui, Tobata, Kitakyushu 804-8550, Japan

bInstitute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba, Sendai 980-8577, Japan

cAdvanced Materials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

Abstract:β-Ga2O3 nanocolumns straightened and crossed perpendicularly each other were deposited on MgO (1 0 0) substrate by vapor phase transport method. Growth of the nanocolumns was examined at steps of 1000, 1050, and 1200 °C in elevation of source-boat temperature. We have drawn out the substrate from deposition-tube at each source-boat temperatures of 1000, 1050, and 1200 °C. Scanning electron microscopy of the sample with source-boat temperature of 1200 °C demonstrated that the straightened and elongated nanocolumns are crossing perpendicularly each other. Typical lengths of the nanocolumns were in the range of several hundreds nanometers below 1050 °C, and those of 1200 °C were in the range of ten to fifteen hundreds nanometers. Diameters of the nanocolumns stayed in the range of few hundreds nanometers, notwithstanding variation of the source temperature. X-ray diffraction and transmission electron microscopy with energy dispersive X-ray spectroscopy revealed that the nanocolumns are monoclinic β-Ga2O3 crystal, and the (4 0 0) plane of β-Ga2O3 nanocolumns is parallel to the (1 0 0) plane of MgO substrate.
Keywords:β-Ga2O3  1D-nanostructure  Epitaxial growth
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