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| 基于粒子群算法的半导体制造设备预维修调度 | |
| 引用本文： | 马慧民,许圣良,叶春明,张爽.基于粒子群算法的半导体制造设备预维修调度[J].工业工程与管理,2008,13(6). |
| 作者姓名： | 马慧民 许圣良 叶春明 张爽 |
| 作者单位： | 1. 上海电机学院,经济管理学院,上海,200245;上海理工大学,管理学院,上海,200093 2. 上海电机学院,经济管理学院,上海,200245 3. 上海理工大学,管理学院,上海,200093 |
| 基金项目： | 上海市高校选拔培养优秀青年教师科研项目 ， 上海市重点学科建设项目 |
| 摘 要： | 对半导体制造设备的预维修调度问题进行了研究，建立了半导体制造设备预维修调度的数学模型，分别提出了用于求解该问题的启发式方法和粒子群算法方案，阐明了两种算法方案的具体实现过程。通过对仿真实例进行计算和结果比较，表明了粒子群算法优于启发式方法，取得了不错的优化效果。 |
| 关 键 词： | 半导体设备 预维修调度 二进制粒子群算法 先来先服务 |
Research on Predicted Maintenance Scheduling for Semiconductor Manufacturing Equipment based on Particle Swarm Optimization Algorithm |
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| MA Hui-min,XU Sheng-liang,YE Chun-ming,ZHANG Shuang.Research on Predicted Maintenance Scheduling for Semiconductor Manufacturing Equipment based on Particle Swarm Optimization Algorithm[J].Industrial Engineering and Management,2008,13(6). | |
| Authors: | MA Hui-min XU Sheng-liang YE Chun-ming ZHANG Shuang |
| Affiliation: | MA Hui-min~(1,2),XU Sheng-liang~1,YE Chun-ming~2,ZHANG Shuang~2 (1.Business School,Shanghai Dianji University,Shanghai 200245,China,2.Business School,Univ.of Shanghai for S&T,Shanghai 200093,China) |
| Abstract: | The problem of predicted maintenance scheduling for semiconductor manufacturing equipment was studied in this paper.A math model was built based on the problem,and then the Binary Particle Swarm Optimization algorithm(BPSO)was used for solving the model.Finally a case study was simulated to demonstrate that the binary particle swarm optimization algorithm is better than First In First Out(FIFO)method. |
| Keywords: | semiconductor equipment predicted maintenance scheduling particle swarm optimization FIFO |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |