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| 2D—SROP—1测量仪的相移装置设计与实现 | |
| 引用本文： | 王菊香. 2D—SROP—1测量仪的相移装置设计与实现[J]. 自动化与仪器仪表, 1995, 0(2) |
| 作者姓名： | 王菊香 |
| 作者单位： | 华中理工大学 |
| 摘 要： | 介绍采用参考压电振动干涉法研制开发的高精表面粗糙度光学轮廓仪（２Ｄ－ＳＲＯＰ—１）。本文在阐述其工作原理之后。叙述了压电振动相移器ＰＺＴ及其驱动器的设计与实现。 |
| 关 键 词： | 移相，干涉，设计 |
Design and Realization of the Phase-shift Device in 2D-SROP-1 Profilemeter |
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| Wang juxiang. Design and Realization of the Phase-shift Device in 2D-SROP-1 Profilemeter[J]. Automation & Instrumentation, 1995, 0(2) | |
| Authors: | Wang juxiang |
| Affiliation: | Wang juxiang |
| Abstract: | An optical profilemeter, which is developed based on piezoelectric transducer hyterodyne technique and used for the roughness measurement of high precision surface, is introduced. And the design and realization of the phase-shift device is also described in this paper. |
| Keywords: | Phase Shift Interference Design |
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