| 氮气压强对脉冲激光沉积类金刚石薄膜和红外光学特性的影响 |
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| 引用本文： | 罗乐,汪毅,储雅琼,高健,方晓东,陶汝华.氮气压强对脉冲激光沉积类金刚石薄膜和红外光学特性的影响[J].中国激光,2011(9). |
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| 作者姓名： | 罗乐 汪毅 储雅琼 高健 方晓东 陶汝华 |
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| 作者单位： | 合肥工业大学电子科学与应用物理学院;中国科学院安徽光学精密机械研究所; |
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| 基金项目： | 中国科学院“百人计划”资助课题 |
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| 摘 要： | 为了研究氮气压强对脉冲激光沉积(PLD)类金刚石(DLC)薄膜和红外光学特性的影响,在脉冲激光沉积类金刚石薄膜的实验过程中,把沉积腔抽真空到10-5Pa,再在沉积腔中分别充入10-3、10-2和10-1Pa的氮气来沉积类金刚石薄膜。用拉曼光谱仪和X射线光电子能谱仪(XPS)对类金刚石薄膜的微结构与组成进行检测分析;用原子力显微镜(AFM)对薄膜的表面形貌进行检测分析;用傅里叶变换红外光谱仪(FTIR)对类金刚石薄膜的红外光透射谱进行检测分析。实验结果表明,沉积腔中的氮气压强从10-3Pa增加到10-1Pa时,类金刚石薄膜中sp3键含量增加;C-O和C=O含量减少;石墨晶粒尺寸减小;薄膜表面粗糙度显著增大。与此同时,氮气压强增加还导致类金刚石薄膜对红外光的增透作用减弱、增透范围变窄。
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| 关 键 词： | 薄膜 类金刚石 脉冲激光沉积法 氮气压强 微结构 傅里叶变换红外光谱 |
Influence of the Nitrogen Pressure on Diamond-Like Carbon Film Deposited by Pulsed Laser and Its Infrared Property |
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| Luo Le Wang Yi Chu Yaqiong Gao Jian Fang Xiaodong Tao RuhuaElectronics , Applied Physics School,Hefei University of Technology,Hefei,Anhui ,ChinaAnhui Institute of Optics , Fine Mechanics,Chinese Academy of Sciences,Anhui ,China.Influence of the Nitrogen Pressure on Diamond-Like Carbon Film Deposited by Pulsed Laser and Its Infrared Property[J].Chinese Journal of Lasers,2011(9). |
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| Authors: | Luo Le Wang Yi Chu Yaqiong Gao Jian Fang Xiaodong Tao RuhuaElectronics Applied Physics School Hefei University of Technology Hefei Anhui ChinaAnhui Institute of Optics Fine Mechanics Chinese Academy of Sciences Anhui China |
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| Affiliation: | Luo Le1 Wang Yi1 Chu Yaqiong1 Gao Jian1 Fang Xiaodong2 Tao Ruhua21Electronics and Applied Physics School,Hefei University of Technology,Hefei,Anhui 230009,China2Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Anhui 230031,China |
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| Abstract: | How the nitrogen pressure in the chamber influences the diamond-like carbon(DLC) film deposited by pulsed laser deposition(PLD) and its infrared property are investigated.The DLC films are deposited on silicon substrates by pulsed laser when the nitrogen pressure in the chamber is 10-3,10-2 and 10-1 Pa respectively.The microstructure and composition of the DLC films are detected by the visible Raman spectroscopy and the X-ray photoelectron spectroscopy(XPS).The topography of the DLC films is detected by the... |
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| Keywords: | thin films diamond-like carbon pulsed laser deposition nitrogen pressure microstructure Fourier transform infrared spectra |
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