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六氟化硫气体中微量杂质分析的研究
引用本文:邱惠珍,周卉,孙叶青,薛伟明,杨遂平.六氟化硫气体中微量杂质分析的研究[J].低温与特气,2010,28(2):26-29.
作者姓名:邱惠珍  周卉  孙叶青  薛伟明  杨遂平
作者单位:上海基量标准气体有限公司,上海,宜山路,770号,109室,200233
摘    要:用两种气相色谱法测定了六氟化硫气体中微量杂质:Air、CF4、C3F8、SO2F2、SOF2、S2F10O,比较了热导—火焰光度串联法与氦离子色谱法的分析结果,相对误差小于3.0%,并对分析结果中的问题进行了讨论。

关 键 词:六氟化硫分析  色谱法  低硫氟化物  SOF  SOF  SFO

The Study of Trace Impurities Analysis in Sulfur Hexafluoride Gas
QIU Hui-zhen,ZHOU Hui,SUN Ye-qing,XUE Wei-ming,YANG Sui-ping.The Study of Trace Impurities Analysis in Sulfur Hexafluoride Gas[J].Low Temperature and Specialty Gases,2010,28(2):26-29.
Authors:QIU Hui-zhen  ZHOU Hui  SUN Ye-qing  XUE Wei-ming  YANG Sui-ping
Affiliation:(Shanghai Ji Liang Reference Gas Ltd.,Unit 109,770 Yi Shan Rd.,Shanghai 200233,China)
Abstract:The article described two kinds of gas chromatography determination of trace impurities in sulfur hexafluoride gas:Air,CF4,C3F8,SO2F2,SOF2,S2F10O. Compared the thermal conductivity-flame photometric series law and helium ion chromatography analysis of the results.The relative error is less than 3.0%. And the results of the analysis of the problem is discussed.
Keywords:SO2F2  SOF2  S2F10O
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