| 热处理对钛掺杂类金刚石薄膜场发射性能的影响 |
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| 引用本文： | 李栓平,刘竹波,王永胜,于盛旺,贺志勇,周兵.热处理对钛掺杂类金刚石薄膜场发射性能的影响[J].机械工程材料,2021,45(1):8-13. |
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| 作者姓名： | 李栓平 刘竹波 王永胜 于盛旺 贺志勇 周兵 |
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| 作者单位： | 太原理工大学新型碳材料研究院, 太原 030024;太原理工大学新型碳材料研究院, 太原 030024;太原理工大学新型碳材料研究院, 太原 030024;太原理工大学新型碳材料研究院, 太原 030024;太原理工大学新型碳材料研究院, 太原 030024;太原理工大学新型碳材料研究院, 太原 030024 |
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| 基金项目： | 山西省应用基础研究计划(青年基金)项目;山西省"1331工程"工程研究中心项目;山西省科技重大专项项目;国家自然科学基金资助项目;科技部中-白政府间交流项目 |
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| 摘 要： | 采用多靶磁控溅射技术制备了钛掺杂类金刚石(Ti-DLC)薄膜,并在不同温度(300,350,400℃)下进行了热处理,研究了热处理温度对薄膜微观结构、成分、能带结构以及场发射性能的影响.结果表明:与热处理前的相比,300℃热处理后Ti-DLC薄膜中sp2-C团簇相对含量增大,光学带隙最小,开启场强最低,为5.43 V·...
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| 关 键 词： | 钛掺杂 类金刚石 热处理 TiO2 光学带隙 场发射性能 |
Effect of Heat Treatment on Field Emission Properties of Ti-Doped Diamond-like Carbon Film |
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| LI Shuanping,LIU Zhubo,WANG Yongsheng,YU Shengwang,HE Zhiyong,ZHOU Bing.Effect of Heat Treatment on Field Emission Properties of Ti-Doped Diamond-like Carbon Film[J].Materials For Mechanical Engineering,2021,45(1):8-13. |
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| Authors: | LI Shuanping LIU Zhubo WANG Yongsheng YU Shengwang HE Zhiyong ZHOU Bing |
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| Affiliation: | (Institute of New Carbon Materials,Taiyuan University of Technology,Taiyuan 030024,China) |
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| Abstract: | The Ti-doped diamond-like carbon(Ti-DLC)film was prepared by multi-target magnetron sputtering technique,and was heat-treated at different temperatures(300,350,400℃).The effects of heat treatment temperature on the microstructure,composition,band structure and field emission properties of the film were studied.The results show that compared with those before heat treatment,the proportion of sp2-C clusters in the Ti-DLC film after heat treatment at 300℃increased;the optical band gap was the smallest,and the turn-on field with value of 5.43 V·μm-1was the smallest,indicating the film had the best field emission performance.As the temperature was higher than 300℃,the content of diamond-like carbon in the films dropped,and a large amount of TiO2formed;the optical band gap and the turn-on field increased,indicating the field emission performance of the films got worse.The field emission current of the film was not affected by the heat treatment temperature. |
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| Keywords: | Ti-doping diamond-like carbon heat treatment TiO2 optical band gap field emission property |
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