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Topology optimization of electrostatically actuated microsystems |
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| Authors: | M. Raulli K. Maute |
| Affiliation: | (1) Dept. of Mechanical Engineering, Villanova University, 800 Lancaster Avenue, Villanova, PA 19085, USA;(2) Dept. of Aerospace Engineering Sciences, University of Colorado, Campus Box 429, Boulder, CO 80309, USA |
| Abstract: | |
| Keywords: | Microelectromechanical systems Topology optimization Electrostatic-mechanical coupling Sensitivity analysis Adjoint formulation |
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