1 W/mm RF power density at 3.2 GHz for a dual-layer RESURF LDMOStransistor |
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Authors: | Olsson J Rorsman N Vestling L Fager C Ankarcrona J Zirath H Eklund K-H |
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Affiliation: | Angstrom Lab., Uppsala Univ.; |
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Abstract: | In this letter, we present state-of-the-art performance, in terms of output power density, for an RF-power LDMOS transistor. The novel device structure has a dual-layer RESURF of the drift region, which allows for a sub-μm channel length and a high breakdown voltage of 110 V. The output power density is more than 2 W/mm at 1 GHz and a VDS=70 V, with a stable gain of 23 dB at VDS=50 V. At 3.2 GHz the power density is over 1 W/mm at VDS=50 V and 0.6 W/mm at VDS=28 V. These results are to our knowledge the best ever for silicon power MOSFETs |
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