Cryogenic abrasive jet machining of polydimethylsiloxane at different temperatures

The temperature dependence of the solid particle erosion of polydimethylsiloxane (PDMS) using aluminum oxide particles was investigated between the temperatures of ?178 and 17 °C for a variety of angles of attack using a novel cryogenic abrasive jet machining apparatus. It was found that the most efficient machining of PDMS (volume removed per kinetic energy of erodent) occurred at approximately ?178 °C, at angles of attack between 30° and 60° from the surface. A previously developed surface evolution model was used to predict the size and shape of unmasked channels at various temperatures. A good agreement between the predicted and measured channel profiles was obtained when the average blasting temperature was between approximately ?127 and ?178 °C. At ?82 °C, the fit was poorer, probably because of an increase in particle embedding. Although it was demonstrated that PDMS could be machined at temperatures above its glass transition, the erosion rate increased by a factor of more than 10 when the machining temperature was below this point.