| 金属膜电极层对Na2O-PbO-Nb2O5-SiO2玻璃陶瓷电容器电性能的影响 |
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| 引用本文： | 朱君,罗君,张庆猛,杜军.金属膜电极层对Na2O-PbO-Nb2O5-SiO2玻璃陶瓷电容器电性能的影响[J].无机材料学报,2011(6):613-618. |
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| 作者姓名： | 朱君 罗君 张庆猛 杜军 |
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| 作者单位： | 北京有色金属研究总院先进电子材料研究所; |
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| 基金项目： | 国家高技术研究发展计划(863计划)(2008AA03A236)~~ |
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| 摘 要： | 玻璃陶瓷电容器内电极结构及界面形貌对电性能有重要影响.采用磁控溅射法在介质层与银浆料电极间分别制备了Pt、Au、Cu和Ag金属膜内电极层,研究此电极层对Na2O-PbO-Nb2O5-SiO2玻璃陶瓷电容器电性能的影响.与单层浆料的电极结构相比,引入Pt、Au金属膜可以更有效地改善电性能:等效电容值增加25%,漏电流降低一个数量级.由SEM结果可知:Pt、Au、Cu膜与玻璃陶瓷紧密的界面接触能够抑制银向介质中扩散;然而,采用单层银浆料或引入Ag金属膜的样品界面多孔且银扩散严重.以上分析表明:Pt、Au金属膜电极层能够改善玻璃陶瓷电容器界面微观结构,有效抑制银的扩散,提高整体电性能.
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| 关 键 词： | 金属膜 内电极 玻璃陶瓷电容器 电性能 扩散 |
Effect of Metal Film Electrode Layer on Electrical Properties of Na_2O-PbO-Nb_2O_5-SiO_2 Glass-ceramic Capacitors |
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| ZHU Jun,LUO Jun,ZHANG Qing-Meng,DU Jun.Effect of Metal Film Electrode Layer on Electrical Properties of Na_2O-PbO-Nb_2O_5-SiO_2 Glass-ceramic Capacitors[J].Journal of Inorganic Materials,2011(6):613-618. |
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| Authors: | ZHU Jun LUO Jun ZHANG Qing-Meng DU Jun |
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| Affiliation: | ZHU Jun,LUO Jun,ZHANG Qing-Meng,DU Jun(Advanced Electronic Materials Institute,General Research Institute for Nonferrous Metals,Beijing 100088,China) |
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| Abstract: | The electrical performance of the stacked glass-ceramic capacitors depends largely on the inner elec-trode structure and the interface quality.In this work,several metal films,such as Pt,Au,Cu and Ag,were depos-ited by DC magnetron sputtering serving as inner electrode layers between the dielectric layer and the silver paste electrode of glass-ceramic capacitors.The effect of the deposited metal films on the electrical properties of Na2O-PbO-Nb2O5-SiO2 glass-ceramic capacitors was investigated.Compared with... |
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| Keywords: | metal film inner electrode glass ceramic capacitors electrical properties diffusion |
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