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| AlN薄膜有源SAW滤波器集成及性能研究 | |
| 引用本文： | 刘桥,王代强,冯杰,王忠良. AlN薄膜有源SAW滤波器集成及性能研究[J]. 电子元件与材料, 2007, 26(11) |
| 作者姓名： | 刘桥 王代强 冯杰 王忠良 |
| 作者单位： | 贵州大学,电子科学系,贵州,贵阳,550025;贵州大学,电子科学系,贵州,贵阳,550025;贵州大学,电子科学系,贵州,贵阳,550025;贵州大学,电子科学系,贵州,贵阳,550025 |
| 摘 要： | 在AlN压电薄膜上(以SiO2/Si为衬底),使用MOS集成电路工艺制作叉指电极和单元电路,制成中心频率为320MHz的有源SAW滤波器并进行了测试。结果表明,该滤波器的插入损耗低于10dB,带外衰减高于45dB。 |
| 关 键 词： | 电子技术 AlN压电薄膜 叉指换能器 有源SAW滤波器 |
Study on properties and integration of AlN thin film active SAW filter |
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| LIU Qiao,WANG Dai-qiang,FENG Jie,WANG Zhong-liang. Study on properties and integration of AlN thin film active SAW filter[J]. Electronic Components & Materials, 2007, 26(11) | |
| Authors: | LIU Qiao WANG Dai-qiang FENG Jie WANG Zhong-liang |
| Abstract: | Fabricated the interdigitated electrodes and the circuit elements via the MOS IC processing on AlN piezoelectric thin film, the active surface acoustic wave (SAW) filter was produced and studied, which centre frequency was 320 MHz. Results show it’s insertion loss is smaller than 10 dB, and above 45 dB the decay is in out of the band. |
| Keywords: | electron technology AlN piezoelectric thin film interdigitated transducer active surface acoustic wave filter |
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