| 直流热阴极PCVD法间歇生长模式间歇周期的研究 |
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| 引用本文： | 陈玉强,姜宏伟,彭鸿雁,尹龙承.直流热阴极PCVD法间歇生长模式间歇周期的研究[J].真空,2011,48(3). |
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| 作者姓名： | 陈玉强 姜宏伟 彭鸿雁 尹龙承 |
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| 作者单位： | 牡丹江师范学院新型碳基功能与超硬材料省重点实验室,黑龙江牡丹江,157012 |
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| 基金项目： | 黑龙江省教育厅2009科学技术研究面上项目，黑龙江省博士后基金资助项目 |
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| 摘 要： | 采用直流热阴极PCVD方法间歇生长模式,在CH4-H2气氛常规制备微米晶金刚石膜的参数条件下,利用人工干预二次形核工艺,研究了间歇周期变化对制备纳米晶金刚石膜的影响.人工干预二次形核是指通过生长温度的周期性改变而诱发二次形核行为,从而实现金刚石膜的纳米晶生长.金刚石膜周期性生长过程分为沉积阶段和干预阶段,沉积阶段主要完成金刚石膜的生长,干预阶段将沉积温度降低到600℃,然后恢复到生长温度,即完成一个生长周期.间歇周期研究主要是考察在不同间歇时间里人工干预诱导二次形核的效果,间歇时间设定为1 min、5 min、10 min、15min、20 min,生长时间设为20 min,总的沉积时间为6 h.采用拉曼光谱仪、SEM和XRD对样品进行了分析,结果表明直流热阴极PCVD方法间歇生长模式,间歇周期的变化,对二次形核的发生有诱导作用,适当选择间歇周期,有利于二次形核基团的生成.
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| 关 键 词： | 人工干预二次形核 纳米金刚石膜 直流热阴极PCVD 间歇生长 |
On the cycle of intermittent growth of diamond films by PCVD with DC hot cathode used |
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| CHEN Yu-qiang,JIANG Hong-wei,PENG Hong-yan,YIN Long-cheng.On the cycle of intermittent growth of diamond films by PCVD with DC hot cathode used[J].Vacuum,2011,48(3). |
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| Authors: | CHEN Yu-qiang JIANG Hong-wei PENG Hong-yan YIN Long-cheng |
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| Affiliation: | CHEN Yu-qiang,JIANG Hong-wei,PENG Hong-yan,YIN Long-cheng(Key Laboratory of New Carbon-Function & Superhard Material of Heilongjiang Province,Mudanjiang Normal College,Mudanjiang 157012,China) |
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| Abstract: | Intermittent film growth was introduced into the preparation of diamond films with their grains in microns by conventional PCVD process with DC hot cathode used in CH4-H2 atmosphere.With the parameters of the process kept unchanged,the manual intervention was applied to the secondary nucleation,and the effect of change in intermittent cycle on the preparation of diamond nanofilms was studied,where the manual intervention served the function of inducing secondary nucleation by cyclical change of the growing ... |
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| Keywords: | manual intervention secondary nucleation diamond nanofilm PCVD DC hot cathode intermittent growth |
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