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| 真空计的发展概况与趋势 | |
| 引用本文： | 梁平,李杰,戴佳鑫,干蜀毅. 真空计的发展概况与趋势[J]. 真空与低温, 2011, 17(1): 53-57,62. DOI: 10.3969/j.issn.1006-7086.2011.01.012 |
| 作者姓名： | 梁平 李杰 戴佳鑫 干蜀毅 |
| 作者单位： | 合肥工业大学机械与汽车工程学院真空技术与装备系,安徽,合肥,230009 |
| 摘 要： | 真空计量器具被广泛应用于各科学实验领域,种类繁多,样式各异。真空计的微型化是其主要发展趋势。概述了真空计的发展历程,重点对近年来真空计的最新发展作了梳理,并提出了某些特殊环境下真空度测量方法的构想。 |
| 关 键 词： | 真空计 真空测量 微机电系统 电容薄膜真空计 |
REVIEW AND TREND ON THE DEVELOPMENT OF VACUUM GAUGE |
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| LIANG Ping,LI Jie,DAI Jia-xin,GAN Shu-yi. REVIEW AND TREND ON THE DEVELOPMENT OF VACUUM GAUGE[J]. Vacuum and Cryogenics, 2011, 17(1): 53-57,62. DOI: 10.3969/j.issn.1006-7086.2011.01.012 | |
| Authors: | LIANG Ping LI Jie DAI Jia-xin GAN Shu-yi |
| Affiliation: | LIANG Ping,LI Jie,DAI Jia-xin,GAN Shu-yi(Department of Vacuum Science and Equipment School of Machical and Automobile Engineering,Hefei University of Technology,Hefei 230009,China) |
| Abstract: | The vacuum gauge has various styles,and is widely used in many scientific field as well as industries.A notable trendency for the development of modern gauges is their miniaturization.In this paper,the history,especially its recent development of vacuum gauge is reviewed,and some vacuum measurement under special circumstances is discussed. |
| Keywords: | vacuum gauge vacuum measurement MEMS capacitance diaphragm gauge(CDG) |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |