微纳米三坐标测量机接触扫描探头稳定性分析(英文)

对微纳米三坐标测量机(CMM)高精度扫描探头的稳定性进行了分析.该扫描探头由带有球头的光纤探针、悬浮机构、二维角度传感器和微型迈克尔逊干涉仪4部分组成.光纤探针和悬浮片固定在一起,当光纤探针的球头受到触碰时,会带动悬浮机构的悬线发生形变,进而导致贴在悬浮片上的平面反射镜倾斜或在竖直方向上发生位移,前者由二维角度传感器进行感测,后者由微型迈克尔逊干涉仪进行感测.实验结果表明,环境温度的变化是影响探头稳定性的主要因素,探头中机械结构和部件对温度变化的敏感性要远远大于探头中光电器件对温度变化的敏感性.只要将探头放到一个恒温箱中,待恒温箱温度稳定4 h再开始测量,探头即可达到1 nm的分辨力和30nm的测量标准差.

Stability Analysis of Contact Scanning Probe for Micro/Nano Coordinate Measuring Machine

The stability of a high accuracy contact scanning probe for micro/nano coordinate measuring machine(CMM) was analysed in this paper.This probe was composed of a fiber stylus with a ball tip,a mechanism with a wire-suspended floating plate,a two-dimensional(2D) angle sensor and a miniature Michelson linear interferometer.The stylus was attached to the floating plate.When a contact force was applied to the ball tip,the wires would experience elastic deformation and then the mirrors mounting on the plate would be tilted or displaced in vertical.The displacements of mirrors could be detected by 2D angle sensor and miniature Michelson linear interferometer.Experimental results show that the fluctuation of environmental temperature is the primary factor in affecting the stability of the probe.It is also found that the mechanical structure and components of the probe are much more sensitive to environmental temperature than the optical and electronic components of the probe.The probe can achieve the required resolution of 1 nm and the standard deviation of 30 nm as long as it is kept in a constant temperature chamber for at least 4 h before the measurement.