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The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatings
Authors:Pal  A F  Ryabinkin  A N  Serov  A O
Affiliation:1.Skobeltsyn Institute of Nuclear Physics, Moscow State University, 119991, Moscow, Russia
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Abstract:Technical Physics Letters - Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings of Zr75Pd25 composition were obtained with an average deposition rate of 1.3 nm/s at...
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