The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatings |
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Authors: | Pal A F Ryabinkin A N Serov A O |
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Affiliation: | 1.Skobeltsyn Institute of Nuclear Physics, Moscow State University, 119991, Moscow, Russia ; |
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Abstract: | Technical Physics Letters - Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings of Zr75Pd25 composition were obtained with an average deposition rate of 1.3 nm/s at... |
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