| 微气压传感器测试系统的真空自动控制研究 |
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| 引用本文： | 金仁成,陈涛,张五金,唐祯安.微气压传感器测试系统的真空自动控制研究[J].微纳电子技术,2007(Z1). |
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| 作者姓名： | 金仁成 陈涛 张五金 唐祯安 |
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| 作者单位： | 大连理工大学辽宁省微纳米技术及系统工程重点实验室 辽宁大连116023(金仁成，陈涛，唐祯安)，大连理工大学精密与特种加工教育部重点实验室 辽宁大连116023(张五金) |
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| 摘 要： | 针对微热板式微气压传感器的动、静态性能测试,建立了一套保持真空度稳定的控制系统。参考MATLAB的仿真结果,分别采用模糊控制与模糊PID控制算法设计出控制器,对传感器测试系统的真空度进行了实时控制研究,探讨并分析了真空度动态平衡的控制问题。结果显示,调整系统控制量的模糊PID控制稳态误差小、鲁棒性比较好,可以有效地对测试环境进行真空度调节和设置,能够解决传感器所需气压测试环境10~1000Pa的实时气压控制问题。
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| 关 键 词： | 微气压传感器 真空度平衡 实时控制 模糊PID控制 |
Research on Vacuum Automatic Control of the Micro Gas Pressure Sensor Testing System |
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| JIN Ren-chenga,CHEN Taoa,ZHANG Wu-jinb,TANG Zhen-ana.Research on Vacuum Automatic Control of the Micro Gas Pressure Sensor Testing System[J].Micronanoelectronic Technology,2007(Z1). |
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| Authors: | JIN Ren-chenga CHEN Taoa ZHANG Wu-jinb TANG Zhen-ana |
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| Abstract: | Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree.Through the simulation results based on MATLAB,Fuzzy control and Fuzzy PID control algorithm were applied respectively to design the controller.The real-time control study on the vacuum degree of micro gas pressure sensor testing system was carried out,and the control problems of vacuum degree dynamic equilibrium were discussed and analyzed.The results show that fuzzy PID control based on adjusting system control quantity has less steady-state errors and better robust,which can regulate and set the vacuum degree of testing environment effectively and solve real-time gas pressure control of the 10~1000Pa vacuum testing environment for sensor. |
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| Keywords: | micro gas pressure sensor vacuum degree equilibrium real-time control fuzzy PID control |
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