| 电子束熔炼多晶硅温度场的数值模拟 |
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| 引用本文： | 王步根,黄以平. 电子束熔炼多晶硅温度场的数值模拟[J]. 能源技术(上海), 2009, 0(6): 328-330 |
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| 作者姓名： | 王步根 黄以平 |
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| 作者单位： | 桂林电子科技大学机电工程学院,桂林541004 |
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| 摘 要： | 采用有限元分析软件ANSYS对电子束熔炼多晶硅材料的工艺过程进行了数值模拟。在不同的电子束熔炼工艺参数条件下,进行了多晶硅温度场变化情况的数值模拟,并对其行了分析讨论。所得到的模拟结果较好地反应了电子柬熔炼多晶硅温度场变化的特点。
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| 关 键 词： | 电子束 多晶硅 有限元 温度场 |
Numerical Simulation for Temperature Field of Electron Beam Melting Polysilicon |
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| WANG Bu-gen,HUANG Yi-ping. Numerical Simulation for Temperature Field of Electron Beam Melting Polysilicon[J]. Energy Technology, 2009, 0(6): 328-330 |
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| Authors: | WANG Bu-gen HUANG Yi-ping |
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| Affiliation: | (School of Mechanical ＆ Electronic Engineering, Guilin University of Electronic Technology, Guilin, 541004, China) |
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| Abstract: | Finite element software ANSYS, in this paper, polysilicon materials, electron-beam melting process was numerically simulated. The use of ANSYS to calculate the electron beam melting process parameters to change the conditions of temperature polysilicon changes in values, and the situation were discussed. Polysilicon materials for the preparation of a good provides a theoretical basis, the actual production has certain reference value. |
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| Keywords: | electron beam polysilicon finite element temperature field |
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