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Evaluation of a liquid metal ion source for secondary ion mass spectrometry |
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| Affiliation: | 1. Dunholme, Raven Hall Road, Ravenscar, YO13 0NA, UK;2. Natural History Museum (NHM, retired), Cromwell Road, London, UK;3. School of Physical Sciences, University of Kent, Canterbury, Kent, UK;4. Ion Beam Centre (IBC), University of Surrey, Guildford, UK;5. UTEP, Jacobs-JETS, and NASA Johnson Space Center (NASA-JSC), Houston, TX, USA;6. European Space Agency (ESA, retired), Noordwijk, The Netherlands;7. NASA Goddard Space Flight Center (GSFC), Greenbelt, Maryland, USA |
| Abstract: | Positive and negative secondary ion emission of 23 pure elements have been studied for 10 keV In+ and 10 keV O2+ bombardment. In+ ions were produced in a liquid metal ion source. For most of the elements investigated positive and negative secondary ion yields under In+ impact are comparable to those obtained with O2+ primary ions. Admission of oxygen into the sample chamber enhances positive and negative ion intensitities in a strongly element-specific manner. Depth profiles of a Ni/Cr multilayer (100 Å single-layer thickness) using 5 keV In+ primary ions show that these ions may also be applied successfully for secondary ion mass spectrometric depth profiling. |
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