A tribological study of tetrahedral amorphous carbon films prepared by filtered cathodic vacuum arc technique |
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| Authors: | Xiang Yu Xu Zhang Meng Hua |
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| Affiliation: | a School of Engineering and Technology, China University of Geosciences, Xueyuan Road 29, Beijing 100083, Chinab Institute of Low Energy Nuclear Physics, Beijing Normal University, Beijing 1000875, Chinac MEEM Department, City University of Hong Kong, Hong Kongd Oil and Natural Gas Engineering Institute, Petroleum University of China, China |
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| Abstract: | In this study, a series of tetrahedral amorphous carbon films (ta-C) were deposited on silicon, W18Cr4 V high-speed and Cr18Ni9 stainless steel substrates respectively by using pulsed filtered cathodic vacuum arc system with a MEVVA source, and ta-C film’s tribological properties, including the structure, mechanical performance, adhesion, friction and wear character, were investigated. The results show: the hardness and elastic modulus of ta-C film on a high-speed substrate were reached to 76 and 453 Gpa, respectively; and the effects of substrate and film thickness on ta-C film’s friction coefficients have been studied as well; moreover, the corresponding adhesion damage mechanism and wear damage mechanism have been investigated, respectively. |
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| Keywords: | Tetrahedral amorphous carbon Filtered arc Tribological property |
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