Miniaturization of mass spectrometer-based leak detection technology-Technical note

Innovative pumping technology combining both, small-sized scroll- and turbomolecular pumps results in a substantial miniaturization of mass spectrometer-based leak-detector-systems, namely reduction of the outer dimensions to less than 30×30×15 cm and weight to less than 8 kg. To date this technique utilizes the Paul trap principle for leak detection with a sensitivity down to below 10⁻¹⁰ mbar l s⁻¹.