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Modifications in thin film structures by swift heavy ions |
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| Authors: | W.M. Arnoldbik |
| Affiliation: | Surfaces, Interfaces and Devices, Debye Institute, Utrecht University, PO Box 80.000, Utrecht 3508 TA, Netherlands |
| Abstract: | We review older and more recent work concerning modification of thin films during irradiation with heavy ions in the electronic energy deposition regime: loss of H2 and N2 from the bulk of several thin film materials, electronic sputtering of SiO2 and oxygen diffusion across an interface in SiO2. |
| Keywords: | Ion beams Irradiation damage Ion tracks Permeability Hydrogen desorption Oxygen desorption Electronic sputtering Silicon dioxide Elastic recoil detection analysis |
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