基于激光干涉法的谐振式高加速度振动传感器校准技术研究

校准是保证振动传感器测量结果准确和可靠的重要手段。针对传统中频校准装置无法提供高加速度振动激励以及高加速度振动量值无法溯源的问题,开展基于激光干涉法的谐振式高加速度振动传感器校准技术研究。基于谐振原理建立谐振式高加速度振动发生装置,实现高加速度振动发生;建立外差激光干涉法绝对振动校准系统,通过对外差激光干涉信号的直接采集和解调,实现了高加速度振动测量和校准。实验结果表明,该系统能够在140-2929 Hz频率范围、100-10000 m/s²加速度范围内实现振动传感器的灵敏度幅值与相位的有效校准。

Research on the high-acceleration with Resonance Vibration Sensor Calibration technology based on laser interferometry

Calibration is an essential means to ensure the accuracy and reliability of vibration sensor measurement results.Aiming at the problem of the traditional intermediate-frequency calibration device cannot provide high acceleration vibration excitation.The traceability of the high acceleration cannot be accomplished;the research of high-acceleration with Resonance Vibration Sensor Calibration technology based on laser interferometry is developed.Based on the principle of resonance,a resonant high acceleration vibration generator was established to realise high acceleration vibration;The primary vibration calibration system by heterodyne interferometry is built by acquiring and demodulation of heterodyne laser interference signal which achieves the high acceleration vibration measurement and calibration.Experimental results show that the system can effectively calibrate the vibration sensor’s sensitivity amplitude and phase within the frequency range of 140-2929 Hz and the acceleration range of 100-10000 m/s².