直线导轨滚转角测量误差自校正方法

提出一种具有滚转角测量自动校正功能的五自由度运动误差测量系统,解决了平行双光束法在测量滚转角误差时受光束平行度影响较大的问题。介绍了平行双光束法测量五自由度运动误差的原理,建立了关于双光束平行度误差与滚转角测量误差间的模型,提出了基于双自准直单元的双光束平行度误差测量方法。实验结果表明:双光束之间存在15.4″的平行度误差时,可以将滚转角测量误差的残差由44″减小到2.7″。该校正方法有效提高了双光束测量滚转角的准确性,可用于直线导轨运动误差的在线监测。

Self-correction Method of Rolling Angle Measurement Error for Linear Guide Rail

The precision of parallel dual-beam method is greatly affected by the beams’ parallelism when measuring a roll angle error, a five-degree-of-freedom motion error measurement system with self-correction function for roll angle measurement is proposed. The principle of a five-degree-of-freedom measuring system using double beam method is introduced, the model between double beam parallelism error and the roll angle measuring error is achieved, double autocollimator based method for monitoring the parallelism is proposed. The experimental results show that the residual error of the measured roll angle error can be reduced from 44″ to 2.7″ when a parallelism error of 15.4″ exists. The accuracy of the double-beam measurement for roll angle error has been improved effectively. The proposed method can be used to monitor the motion error of linear guides in real time.