Effect of Zr/Ti Ratio on Microstructure and Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition |
| |
| Authors: | Zhanxy Jie Wang Yuki Aoki Hiroyuki Kokawa Masaaki Ichiki Ryutaro Maeda |
| |
| Affiliation: | (1) Department of Materials Processing, Graduate School of Engineering, Tohoku University, Aoba-yama 02 Sendai, 980-8579, Japan;(2) National Institute of Advanced Industrial Science and Technology, 1-2 Namiki, Tsukuba 305-8564, Japan |
| |
| Abstract: | PZT films were fabricated using various targets of Pb(ZrxTi1 – x)O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70, and with excess PbO of 20 wt% on Pt/Ti/SiO2/Si(100) substrates. The rosette structure was observed in the films derived from the target with a Zr/Ti ratio of 70/30 and disappeared with increasing titanium composition. The observations on surface and cross-sectional microstructure were consistent with a higher perovskite nucleation for the higher Ti content films. The PZT films derived from the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout the thickness of the film and no pyrochlore phase on the surface was observed. The PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than those derived from the target with a Zr/Ti ratio of 52/48. |
| |
| Keywords: | lead zirconate titanate thin film pulsed laser deposition crystalline phases microstructure ferroelectric properties |
| 本文献已被 SpringerLink 等数据库收录！ |
|
