Utility of RF MEMS miniature switched capacitors in phase shifting applications |
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| Affiliation: | 1. Dept. of Electronic Science, SGTB Khalsa College, University of Delhi North Campus, New Delhi 110007, India;2. Dept. of Electronics and Telecommunication Engineering, Jadavpur University, Kolkata 700032, India;1. Institute of Space Electronics and Information Technology, School of Electronic Science and Engineering, National University of Defense Technology, China;2. Department of Signal Processing and Acoustics, Aalto University, Finland;3. China Academy of Electronics and Information Technology, China Electronics Technology Group Corporation, China;1. Department of Electronics and Communication Engineering, CTAE, MPUAT, Udaipur, India;2. Institute of Technology, Nirma University, Ahmadabad, Gujarat, India;1. Department of Electronics, S.G.T.B. Khalsa College, University of Delhi, Delhi 110007, India;2. Department of Electronic Science, University of Delhi-South Campus, New Delhi 110021, India;1. Crystal Lab, Department of Physics & Astrophysics, University of Delhi, Delhi 110007, India;2. Department of Electronics, SGTB Khalsa College, University of Delhi, Delhi 110007, India |
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| Abstract: | This paper demonstrates research carried out towards the development of switched capacitors having miniature dimensions. Such devices are based on the Radio Frequency Micro Electro Mechanical Systems (RF MEMS) technique which has gained prominence in implementing a wide variety of microwave and millimetre devices till date. Switched capacitors having standard or conventional dimensions are prone to several limitations which are addressed by scaling down the standard dimensions by 150× times (in terms of area requirement). Such switched capacitors are employed to develop phase shifters working in K-band (22 GHz) frequency range to yield appreciable performance both in terms of electromechanical and RF characterizations. Such switched capacitors are utilized to develop phase shifters which find immense applications in the design of Phased Array RADARs. Switched capacitors fabricated on 500 µm thick quartz substrates, result in 30° phase shift (0.66 mm × 1 mm in dimension) with associated minimum ?0.18 dB insertion loss and better than ?21 dB reflection coefficient at 22 GHz frequency. Electromechanical characterization reports an actuation voltage of 14.6 V, mechanical vibration frequency of 2.5 MHz and a switching time of 620 ns respectively. Demonstrations showing complete realization of 180° phase shifter (4 mm × 1 mm) employing a cascaded arrangement of six similar 30° unit cells are also included in this paper. |
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| Keywords: | Miniaturization Phase shifters Phased Array RF MEMS Switched capacitors |
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