一种小型电容敏感式加速度计的研制

利用弹性良好的铍青铜为材料制作加速度计中的敏感振动元件,研制出电容敏感式加速度计。设计了一种提取差动电容信号的检测电路。给出了电路中所使用的电子元器件,经分析求解得出了电路的输出电压和传感器信号拾取电容变化量之间的正比例关系。经过实验测试,加速度计的灵敏度大约为391.12mV/(m.s-2)。

Research of a Smart Accelerometer Being Sensed by Capacitance

The material of sense organ is beryllium-bronze,it has good elasticity,and fitting to make elastic vibration element,an accelerometer being sensed by capacitance was researched,the signal pickup circuit of dynamics sensor being sensed by differential capacitance was developed.Electron components of the circuit were listed,after analysing the circuit performance,a direct ratio relationship between output voltage and capacitance change was gained.The experiment shows that the sensitivity is about 391.12 mV/(m·s-2).