Preparation and dielectric properties of polycrystalline films with dense nano-structured BaTiO3 by chemical vapor deposition using inductively coupled plasma

To clarify the dielectric properties of BaTiO₃ with nanometer size region, it is necessary to fabricate the dense structure composed of BaTiO₃ nanoparticles. In the present study, BaTiO₃ nanoparticles were directly deposited on Pt/Al₂O₃/SiO₂/Si substrate by introducing Ba(DPM)₂ and Ti(OiPr)₄ into an inductively coupled plasma (ICP). The optimal condition for preparing dense structure of BaTiO₃ nanoparticles was investigated by changing the substrate temperature. Single phase BaTiO₃ of perovskite structure was obtained at the substrate temperatures between 773 and 1173 K. The dense structure of BaTiO₃ nanoparticles with particle sizes of about 30 nm was successfully obtained at the substrate temperature of 773 K. At the substrate temperature>873 K, the deposited nanoparticles sintered to be the columnar structure. The ε_r and tan δ of the BaTiO₃ nanoparticles were estimated to be 285 and 6.6%, respectively (1 kHz and 100 mV). The phase of the BaTiO₃ nanoparticles were found to be paraelectric by the measurement of C-V curves. The breakdown field of the dense structure of BaTiO₃ nanoparticles was estimated to be 649 kV/cm according to I-V curves. These features are favorable for applying the structure to the dielectric layer of multilayer capacitors.