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Fabrication of 2×2 tapered multimode interference coupler
Authors:Hongzhen Wei Jinzhong Yu Zhongli Liu Xiaofeng Zhang Wei Shi Changshui Fang
Affiliation:Inst. of Semicond., Acad. Sinica, Beijing;
Abstract:The authors demonstrate a 3 dB 2×2 parabolically tapered multimode interference (MMI) coupler with a large cross-section and space between the different ports using silicon-on-insulator technology. The device exhibits a uniformity of <0.8 dB and can be used in the realisation of an MMI-based optical switch with a high extinction ratio
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