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| ����ITO�вĵıȽ��о� | |
| 引用本文： | 张滨,孙玉珍,王文皓. ����ITO�вĵıȽ��о�[J]. 物理测试, 2009, 27(1): 17-0 |
| 作者姓名： | 张滨 孙玉珍 王文皓 |
| 作者单位： | �й���ѧԺ�����о����������Բ������� ���� 110016 |
| 摘 要： | 针对一种进口和国产的ITO靶材，用AES（SEM、SAM）、XPS、UPS和XRD进行了比较研究，通过研究发现两种样品的差别，为提高国产靶材的质量，提供一些改进意见。 |
| 关 键 词： | ITO�в� AES XPS UPS SEM XRD |
| 收稿时间： | 1900-01-01; |
Comparative Study of Domestic and Foreign ITO Targets |
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| ZHANG Bin,SUN Yu-zhen,WANG Wen-hao. Comparative Study of Domestic and Foreign ITO Targets[J]. Physics Examination and Testing, 2009, 27(1): 17-0 | |
| Authors: | ZHANG Bin SUN Yu-zhen WANG Wen-hao |
| Affiliation: | Analysis and Testing Division, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016,Liaoning,China |
| Abstract: | A domestic ITO target and a foreign ITO target were analyzed and compared using AES, XPS, UPS, SEM and XRD. The main differences between domestic and foreign targets were found. Some suggestions were proposed for improving the qualities of the domestic ITO target. |
| Keywords: | ITO target AES XPS UPS SEM XRD |
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