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| 微小型齿轮加工技术 | |
| 引用本文： | 石文天,刘玉德,方泽平,李银宾.微小型齿轮加工技术[J].机械传动,2011,35(5):72-75. |
| 作者姓名： | 石文天 刘玉德 方泽平 李银宾 |
| 作者单位： | 1. 北京工商大学机械工程学院,北京,100048 2. 北京理工大学先进加工技术国防重点学科实验室,北京,100081 3. 青岛港湾职业技术学院,山东青岛,266404 |
| 基金项目： | 国家自然科学基金资助项目(50875026); 北京工商大学青年教师科研启动基金资助项目; 北京市属高等学校人才强教计划资助项目(PHR201106110) |
| 摘 要： | 微小型齿轮是微机电系统的主要零部件,其加工工艺是微机电系统的重要技术.总结并分析了微小型齿轮加工的各种工艺方法,包括LIGA和准LIGA、WEDM工艺、微塑性成形、微刻蚀加工、微细切削加工等方法,介绍了各种方法加工微小型齿轮的研究成果,并指出了其适用范围及优缺点.微细切削微小型齿轮的加工技术又分为微细成形铣削和微细滚削... |
| 关 键 词： | 微小型齿轮 微细切削 微小型加工工艺 成形铣削 滚齿加工 |
Manufacturing Technology of Micro Gear |
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| Shi Wentian,Liu Yude,Fang Zeping,Li Yinbin.Manufacturing Technology of Micro Gear[J].Journal of Mechanical Transmission,2011,35(5):72-75. | |
| Authors: | Shi Wentian Liu Yude Fang Zeping Li Yinbin |
| Affiliation: | Shi Wentian1 Liu Yude1 Fang Zeping2 Li Yinbin3(1 College of Mechanical Engineering,Beijing Technology and Business University,Beijing 100048,China)(2 Key Laboratory of Fundamental Science for Advanced Machining,Beijing Institute of Technology,Beijing 100081,China)(3 Qingdao Harbour Vocational and Technical College,Qingdao 266404,China) |
| Abstract: | Micro gear is an important part and the processing technology of micro gear is the key in MEMS.The manufacturing technology of micro gear including LIGA and quasi-LIGA,WEDM,micro plastic forming,micro etching method,micro cutting technology etc is presented.The result of micro gear processed by the technology is introduced and the advantage and shortcoming of the technology is analyzed.Micro cutting in forming micro gear is divided into the two ways such as micro forming milling and micro hobbing technology... |
| Keywords: | Micro gear Micro cutting Micro manufacturing technology Forming milling Hobbing processing |
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