Volumetric phase-measuring interferometer for three-dimensional coordinate metrology |
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Authors: | Seung-Woo Kim Hyug-Gyo Rhee Ji-Young Chu |
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Affiliation: | Department of Mechanical Engineering, BUPE Creative Research Initiatives Group, Korea Advanced Institute of Science and Technology, Science Town, Daejeon 305-701, South Korea |
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Abstract: | We present a volumetric interferometer that has been specially designed to improve the measurement accuracy of the three-dimensional coordinate metrology by reducing excessive Abbe offsets. The interferometer is composed of two main parts; one is a three-dimensionally movable target and the other is a stationary two-dimensional array of photo-detectors. The target made of point diffraction sources emanates two spherical wavefronts, of which interference intensity is monitored by the photo-detectors. Applying phase shifting allows the phases of the photo-detectors to be precisely obtained, and the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. A prototype built on a CMM demonstrates that the proposed interferometer is capable of measuring the xyz-coordinates of the probe with a volumetric uncertainty of less than 1.0 μm. |
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Keywords: | Volumetric interferometer Phase measuring interferometry Coordinate metrology Multilateration Abbe offset |
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