| 全自动晶圆划片机S运动曲线规划与分析 |
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| 引用本文： | 张伟,闫启亮.全自动晶圆划片机S运动曲线规划与分析[J].电子工业专用设备,2011,40(10):11-14. |
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| 作者姓名： | 张伟 闫启亮 |
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| 作者单位： | 北京中电科电子装备有限公司,北京,101601 |
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| 摘 要： | 针对全自动划片机运动控制系统的特点,对S运动曲线加减速算法进行了深入分析,推导出S曲线加减速的计算公式,并通过试验仿真进行验证,根据分析结果得出S曲线是一种适合全自动划片机高速高精度运动的加减速算法。
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| 关 键 词： | 全自动 晶圆 划片机 S曲线 |
S-shape Curve Programming and Analyzing of Wafer Automated Dicing Machine |
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| ZHANG Wei YAN Qiliang.S-shape Curve Programming and Analyzing of Wafer Automated Dicing Machine[J].Equipment for Electronic Products Marufacturing,2011,40(10):11-14. |
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| Authors: | ZHANG Wei YAN Qiliang |
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| Affiliation: | ZHANG Wei YAN Qiliang (Beijing Zhongdianke Electronic and Equipment Co.Ltd,Beijing 101601,China) |
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| Abstract: | According to the characteristic of automated Dicing machine,in this paper it studies the algorithm of S-shape curve,educing the function of S-shape curve.A simulate example is taken to test the algorithm of S-shape curve,the study shows that S-shape curve is available for the high speed and precision motion in automated dicing machine. |
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| Keywords: | Automation wafer Dicing Machine S-shape curve |
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