| 电弧气化法制备纳米ITO粉末及高密度ITO靶的研制 |
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| 引用本文： | 张雪凤,潘震,王政红,邢朋飞.电弧气化法制备纳米ITO粉末及高密度ITO靶的研制[J].材料开发与应用,2009,24(3):1-3. |
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| 作者姓名： | 张雪凤 潘震 王政红 邢朋飞 |
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| 作者单位： | 1. 中国船舶重工集团公司第七二五研究所,河南,洛阳,471039
2. 广州广船国际股份有限公司军代表室,广东,广州,510000 |
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| 摘 要： | 以纯度为99．99％的纯金属In和Sn为原料，采用电弧气化法制备了单一立方In2O3结构的纳米ITO合金粉末，所制备的粉末以四方和类球形两种形貌存在，粒度主要位于30-70nm，分散性良好；并在此基础上采用常压烧结制备了相对密度高达99．74％，平均电阻率达到1．52×10^-4Ω·cm，结构成份均匀，晶粒尺寸5—10μm左右的超高密度ITO靶材。
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| 关 键 词： | 电弧气化法 纳米 ITO粉 ITO靶 |
Preparation of ITO Nano Powder by Arc Evaporating and Development of Ultra High Density ITO Target |
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| ZHANG Xue-feng,PAN Zhen,WANG Zheng-hong,XING Peng-fei.Preparation of ITO Nano Powder by Arc Evaporating and Development of Ultra High Density ITO Target[J].Development and Application of Materials,2009,24(3):1-3. |
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| Authors: | ZHANG Xue-feng PAN Zhen WANG Zheng-hong XING Peng-fei |
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| Affiliation: | ZHANG Xue-feng1,PAN Zhen2,WANG Zheng-hong1,XING Peng-fei1(Luoyang Ship Materials Research Institute,Luoyang 471039,China,2.Guang zhou Shipyard lnternational Co.Ltd,Guangzhou 510000,China) |
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| Abstract: | ITO nano-powders was prepared by arc evaporating with 99.99% In and Sn as raw materials.The prepared powder has single cubic In2O3 phase in tetragonal and near-sphere pattern.The particle size of the powder is 30~70nm and the dispersity of the powder is good.ITO target with grain size of 5~10μm was prepared with the powder by non-pressure sintering.The ITO target has a homogeneous structure,a relative density of 99.74%,and a average resistivity of 1.52×10-4Ω·cm. |
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| Keywords: | Arc evaporating method Nano ITO powder ITO target |
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