氮化铝粉体工程的研究进展

电子技术微型化、轻型化、高集成和大功率的发展，对基板和封装材料提出更高要求。氮化铝陶瓷具有高导热性、绝缘性、热膨胀系数与半导体硅相近、机械强度高、化学稳定性好、无毒无害等优良特性，是理想的基板材料之一，具有很好的发展前景。高质量氮化铝粉体是制备高性能氮化铝陶瓷的关键。本文分别归纳介绍了微米/纳米氮化铝合成的新技术、新方法及其研究进展，并展望了氮化铝粉体合成的发展趋势。

Research Progress in the Preparation of Aluminum Nitride Powders

The development of miniaturization, lightness, high integration and high power of electronic technology has put forward new requirements for substrate and packaging materials. Aluminum nitride ceramics possess intriguing properties, such as high thermal conductivity, insulation and thermal expansion coefficient being similar to semiconductor silicon, high mechanical strength, good chemical stability and non-toxic, have a good prospect as ideal substrate materials. The preparation of high quality aluminum nitride powder is the key to synthesize high quality aluminum nitride ceramics. In this paper, the traditional methods of micrometer aluminum nitride powder preparation and the new technologies and methods of aluminum nitride nanopowder preparation are introduced, and the research direction and development trend of aluminum nitride powder preparation are prospected.