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Identifying,Resolving, and Quantifying Anisotropy in ReS2 Nanomechanical Resonators
Authors:Bo Xu  Jiankai Zhu  Fei Xiao  Chenyin Jiao  Yachun Liang  Ting Wen  Song Wu  Zejuan Zhang  Lin Lin  Shenghai Pei  Hao Jia  Ying Chen  Ziming Ren  Xueyong Wei  Wen Huang  Juan Xia  Zenghui Wang
Affiliation:1. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054 P. R. China;2. Yangtze Delta Region Institute (Huzhou), University of Electronic Science and Technology of China, Huzhou, 313001 P. R. China;3. State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050 P. R. China;4. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, 710049 P. R. China
Abstract:As an emerging two-dimensional semiconductor, rhenium disulfide (ReS2) is renowned for its strong in-plane anisotropy in electrical, optical, and thermal properties. In contrast to the electrical, optical, optoelectrical, and thermal anisotropies that are extensively studied in ReS2, experimental characterization of mechanical properties has largely remained elusive. Here, it is demonstrated that the dynamic response in ReS2 nanomechanical resonators can be leveraged to unambiguously resolve such disputes. Using anisotropic modal analysis, the parameter space for ReS2 resonators in which mechanical anisotropy is best manifested in resonant responses is determined. By measuring their dynamic response in both spectral and spatial domains using resonant nanomechanical spectromicroscopy, it is clearly shown that ReS2 crystal is mechanically anisotropic. Through fitting numerical models to experimental results, it is quantitatively determined that the in-plane Young's moduli are 127 and 201 GPa along the two orthogonal mechanical axes. In combination with polarized reflectance measurements, it is shown that the mechanical soft axis aligns with the Re-Re chain in the ReS2 crystal. These results demonstrate that dynamic responses in nanomechanical devices can offer important insights into intrinsic properties in 2D crystals and provide design guidelines for future nanodevices with anisotropic resonant responses.
Keywords:anisotropy  mechanical properties  mode shapes  nanomechanical resonator  ReS 2
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