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基于锁相技术的微机械陀螺闭环驱动电路
引用本文:刘晓为,莫冰,谭晓昀,陈伟平.基于锁相技术的微机械陀螺闭环驱动电路[J].纳米技术与精密工程,2008,6(6):458-463.
作者姓名:刘晓为  莫冰  谭晓昀  陈伟平
作者单位:1. 哈尔滨工业大学MEMS中心,哈尔滨,150001;微系统与微结构制造教育部重点实验室,哈尔滨,150001
2. 哈尔滨工业大学MEMS中心,哈尔滨,150001
摘    要:传统的闭环驱动电路其输出信号的频率与微机械陀螺驱动方向的固有频率存在一定偏差,且频率抖动较大,系统的建立时间较长.基于上述不足,在分析微机械陀螺闭环驱动方式工作原理的基础上,提出一种基于锁相技术的闭环驱动电路方案,电路进入稳定工作状态时,交流驱动电压与驱动方向敏感电流的相位及频率一致.微机械陀螺在驱动方向谐振,显著改善了输出信号的频率特性.仿真结果表明,这种闭环驱动电路输出信号频率与微机械陀螺驱动模态固有频率完全一致,频率抖动及系统建立时间分别是传统闭环驱动电路的38%和50%.通过实验验证了该方法的可行性

关 键 词:锁相技术  闭环驱动电路  微机械陀螺  频率特性

Closed-Loop Drive Circuit for the Micromachined Gyroscope Based on the Phase-Locked Technology
LIU Xiao-wei,MO Bing,TAN Xiao-yun,CHEN Wei-ping.Closed-Loop Drive Circuit for the Micromachined Gyroscope Based on the Phase-Locked Technology[J].Nanotechnology and Precision Engineering,2008,6(6):458-463.
Authors:LIU Xiao-wei  MO Bing  TAN Xiao-yun  CHEN Wei-ping
Affiliation:LIU Xiao-wei, MO Bing, TAN Xiao-yun, CHEN Wei-ping ( 1. MEMS Center, Harbin Institute of Technology, Harbin 150001, China; 2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin 150001, China)
Abstract:The traditional closed-loop drive circuit had a deviation between the frequency of the output signal and the inherent frequency of the micromachined gyroscope along the driving direction, and the frequency jitter was not very small. Moreover, this circuit had a long settling time. In order to find a solution, by investigating the principle of the closed-loop drive method for the micromachined gyroscope, a closed-loop drive circuit based on the phase-locked technology was presented. Under stable condition, the drive signal of this circuit had the same frequency and phase as the sensitive electric current, and the gyroscope resonated along the driving direction. This proposed circuit improved the frequency character of the output signal. The simulation results show that there is no deviation between the frequency of the output signal and the gyroscope's inherent frequency when using this circuit, the frequency jitter and settling time of this circuit are 38% and 50% of the traditional circuit, respectively. The experimental results demonstrate the feasibility of the method.
Keywords:phase-locked technology  closed-loop drive circuit  micromachined gyroscope  frequency character
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