| 紫外激光在微细加工技术中的优势研究 |
| |
| 引用本文： | 俞君,曾智江,朱三根,龚海梅.紫外激光在微细加工技术中的优势研究[J].红外,2008,29(6):9-14. |
| |
| 作者姓名： | 俞君 曾智江 朱三根 龚海梅 |
| |
| 作者单位： | 中国科学院上海技术物理研究所传感技术国家重点实验室,上海,200083 |
| |
| 摘 要： | 本文主要涉及紫外激光加工技术。通过实验,将紫外/红外两种激光设备对材料的加工结果进行比较,发现在特殊材料加工上,紫外激光相对于红外激光,加工边沿更光滑、效率更高。对于用红外透过率较高的材料加工的红外器件来说,紫外激光在加工中具有明显的优势。
|
| 关 键 词： | 紫外激光 红外激光 红外器件 |
| 文章编号： | 1672-8785(2008)06-0009-05 |
| 修稿时间： | 2008年1月9日 |
Research on Advantages of UV Laser in Fine Processing Technology |
| |
| YU Jun,ZENG Zhi-jiang,ZHU San-gen,GONG Hai-mei.Research on Advantages of UV Laser in Fine Processing Technology[J].Infrared,2008,29(6):9-14. |
| |
| Authors: | YU Jun ZENG Zhi-jiang ZHU San-gen GONG Hai-mei |
| |
| Abstract: | In this paper,the ultraviolet (UV) processing technology is mainly presented.The materials processed by both UV and infrared (IR) laser equipment are compared with each other in experiment. The experimental results show that the UV laser is better than the YAG laser in processing quality and efficiency.Especially,the UV laser is obviously superior in the fine processing of the material for IR devices with high transmittance. |
| |
| Keywords: | UV laser YAG laser infrared detector |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《红外》浏览原始摘要信息 |
|
点击此处可从《红外》下载全文 |
|
