| 微晶硅电池的制备及提高其效率的优化 |
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| 引用本文： | 张晓丹,赵颖,朱锋,高艳涛,麦耀华,魏长春,孙建,耿新华,熊绍珍.微晶硅电池的制备及提高其效率的优化[J].太阳能学报,2006,27(5):419-422. |
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| 作者姓名： | 张晓丹 赵颖 朱锋 高艳涛 麦耀华 魏长春 孙建 耿新华 熊绍珍 |
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| 作者单位： | 南开大学光电子薄膜器件与技术研究所,天津,300071 |
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| 基金项目： | 天津市科委攻关项目(043186511)，国家自然科学基金项目(60506003)，天津市国际科技合作项目(05YFGHHZ01400) |
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| 摘 要： | 采用甚高频等离子体增强化学气相沉积(VHF-PECVD)技术制备了不同硅烷浓度系列的微晶硅电池。结果表明:电池的开路电压随着硅烷浓度的增大而逐渐增加,而电池的短路电流则先增加后减小,在转折点电池的效率达到最大,填充因子则变化不明显;(220)择优取向出现,I(220)/I(111)比值大,电池的短路电流密度也大,电池的效率也最高;在实验的范围内,电池的短路电流密度和厚度成正比例关系;首次在国内制备出了效率达7.3%,短路电流密度(Jsc)为21.7mA/cm2,开路电压(Voc)为0.52V,填充因子(FF)为65%的微晶硅电池。
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| 关 键 词： | 微晶硅电池 甚高频等离子体增强化学气相沉积 短路电流密度 |
| 文章编号： | 0254-0096（2006）05-0419-04 |
| 收稿时间： | 11 2 2004 12:00AM |
| 修稿时间： | 2004-11-02 |
FABRICATION OF MICROCRYSTALLINE SILICON SOLAR CELLS AND OPTIMIZATION STUDY OF THE EFFICIENCY |
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| Zhang Xiaodan,Zhao Ying,Zhu Feng,Gao Yantao,Mai Yaohua,Wei Changchu,Sun Jian,Geng Xinhua,Xiong Shaozhen.FABRICATION OF MICROCRYSTALLINE SILICON SOLAR CELLS AND OPTIMIZATION STUDY OF THE EFFICIENCY[J].Acta Energiae Solaris Sinica,2006,27(5):419-422. |
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| Authors: | Zhang Xiaodan Zhao Ying Zhu Feng Gao Yantao Mai Yaohua Wei Changchu Sun Jian Geng Xinhua Xiong Shaozhen |
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| Abstract: | Series of microcrystalline silicon solar cells were prepared at different silane concentrations(SC).The results showed that open circuit voltage(V_(oc)) increased with increasing SC,however short maximum circuit current density(J_(sc)) at SC=5.5%,which reaches maximum conversion efficiency of solar cells.Fill factor almost has no chang with the variation of SC.J_(sc) increases with increasing thickness of solar cells in the experiments.Microcrystalline silicon solar cell with conversion efficiency 7.3% was fabricated(J_(sc)=21.7mA/cm~2,V_(oc)=0.52V,FF=65%). |
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| Keywords: | microcrystalline silicon solar cells very high frequency plasma enhanced chemical vapor deposition short circuit current density |
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