| 有效控制AMC的化学过滤方案 |
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| 引用本文： | 白晓清,王小兵.有效控制AMC的化学过滤方案[J].半导体技术,2005,30(12):52-56. |
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| 作者姓名： | 白晓清 王小兵 |
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| 作者单位： | 康斐尔过滤设备有限公司,上海,200336;康斐尔过滤设备有限公司,上海,200336 |
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| 摘 要： | AMC对微电子制程存在潜在严重危害并会导致成品率降低.将传统检测方法和Gigacheck或Gigamonitor相结合,会得到更多的AMC信息.化学过滤器是去除AMC的有效手段,评价化学过滤器的指标不仅要考察吸附效率、吸附容量等指标,还必须对化学过滤器整体进行测试,从而能够提供对特定的AMC有很强针对性和突出去除效果的化学过滤解决方案.
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| 关 键 词： | 化学过滤方案 AMC控制 吸附效率 吸附容量 化学过滤器实验台 Gigacheck Gigamonitor |
| 文章编号： | 1003-353X(2005)12-0052-05 |
Effective Control of AMC by Molecular Filtration |
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| BAI Xiao-qing,WANG Xiao-bing.Effective Control of AMC by Molecular Filtration[J].Semiconductor Technology,2005,30(12):52-56. |
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| Authors: | BAI Xiao-qing WANG Xiao-bing |
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| Affiliation: | Camfil Farr Filtration Co.,Ltd, Shanghai 200336 China |
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| Abstract: | Airborne Molecular Contaminants(AMC) have a potential to adversely affect micro-electronics manufacturing process,reducing yields.More information about AMC can be obtained if a traditional test method is combined with some new methods,Gigacheck and Gigamonitor.Chemical filter is one of most effective measures to remove AMC.To provide an effective chemical filtration solution for specific target AMC removal,not only based on main performance parameters of the filter,such as adsorptive efficiency and adsorptive capacity,but also on the test for a full-scale chemical filter on a Chemical Filter Test Rig. |
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| Keywords: | chemical filtration solution AMC control adsorptive efficiency adsorptive capacity Chemical Filter Test Rig Gigacheck Gigamonitor |
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