| 不同检测电容结构对MEMS电容传感器性能的影响分析 |
| |
| 引用本文： | 董林玺.不同检测电容结构对MEMS电容传感器性能的影响分析[J].传感技术学报,2010,23(4):501-507. |
| |
| 作者姓名： | 董林玺 |
| |
| 作者单位： | 杭州电子科技大学射频电路与系统教育部重点实验室,杭州,310018;东芝水电设备有限公司,杭州,311504 |
| |
| 基金项目： | 国家自然科学基金资助项目资助(60506015);;浙江省自然科学基金资助项目资助(Y107105) |
| |
| 摘 要： | 改进传感器检测电容几何结构能有效改善传感器的性能。本文对梳齿电极结构、栅形电极结构及梳栅电极结构检测电容的性能特点进行分析比较,重点分析了振子质量、空气阻尼、系统阻尼系数比以及灵敏度等特性,得出在相同的外轮廓尺寸、支撑梁、振子厚度以及振子到衬底的距离的条件下,栅形结构传感器的振子质量最大,空气阻尼最小,适合制作高分辨率的传感器;在大气下,梳齿结构灵敏度增加的同时空气阻尼力也会增加,且振子质量较小,适合制作高灵敏度,低分辨率传感器结构;梳栅结构的特点居于两者之间,适合制作需要兼顾分辨率和灵敏度的传感器。通过实例计算,证明了该结果。
|
| 关 键 词： | MEMS 微电容式惯性传感器 检测电容结构 |
Effects of different structure of sensing capacitance on performance of MEMS capacitive sensor |
| |
| DONG Linxi,LI Shouluo,CHEN Jindan,YAN Haixia,XU Li,WANG Guangyi,SUN Lingling.Effects of different structure of sensing capacitance on performance of MEMS capacitive sensor[J].Journal of Transduction Technology,2010,23(4):501-507. |
| |
| Authors: | DONG Linxi LI Shouluo CHEN Jindan YAN Haixia XU Li WANG Guangyi SUN Lingling |
| |
| Affiliation: | 1.The Key Laboratory of RF Circuits and System of Ministry of Education;Hangzhou Dianzi University;Hangzhou 310018;China;2.Toshiba Hydro-Electro Equipments Company;Hangzhou 311504;China |
| |
| Abstract: | Optimizing the structure of a sensing capacitance can improve the performances of MEMS accelerometer. The characteristics of MEMS capacitive accelerometers with comb,bar and comb-bar capacitances,respectively,have been analyzed. The proof mass,air damping and damping ratio of the three different sensor structures are compared on the condition of same dimension,elastic constant of the spring,thickness of the proof mass,distance between the proof mass and the substrate. The results show that the proof mass of... |
| |
| Keywords: | MEMS Micro capacitive inertial sensor Structure of detecting capacitance |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《传感技术学报》浏览原始摘要信息 |
|
点击此处可从《传感技术学报》下载全文 |
|
