| 高电阻率CdSSe光电导薄膜 |
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| 引用本文： | 朱振才 顾培夫. 高电阻率CdSSe光电导薄膜[J]. 半导体光电, 1992, 13(4): 377-379,383 |
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| 作者姓名： | 朱振才 顾培夫 |
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| 作者单位： | 浙江大学光仪系，浙江大学光仪系，浙江大学光仪系 杭州 310027，杭州 310027，杭州 310027 |
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| 摘 要： | 采用真空热蒸发工艺,用掺杂(Cu,Cl)敏化的方法制备高电阻率的CdSSe 光电导薄膜。并测试了不同制备条件和不同热处理工艺下样品的光电导性能。最后讨论了主要的制备工艺参数对 CdSSe 光电导性能的影响。用这种工艺制备的 CdSSe 光电导薄膜,用于液晶光阀空间光调制器件上,得到了很好的效果。
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| 关 键 词： | 光电导薄膜 真空蒸发 掺杂 光阀 |
CdSSe Photoconductive Films with High Resistivity |
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| Zhu Zhencai Gu peifu Tang Jinfa. CdSSe Photoconductive Films with High Resistivity[J]. Semiconductor Optoelectronics, 1992, 13(4): 377-379,383 |
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| Authors: | Zhu Zhencai Gu peifu Tang Jinfa |
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| Abstract: | High resistivity and high sensitivity CdSSe photoconductive films have been prepared using vacuum-evaporation and doping(Cu,Cl) techniques. Photoconductive properties of the films under different preparation conditions and annealing process are also presented.The influence of the preparation conditions on the performance of the doped CdSSe films is described.The films prepared with the above processes have been successfully used in the liquid crystal light valves. |
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| Keywords: | Photoconductive Films Vacuum-Evaporation Doping Light valves |
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