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| KDP晶体二倍频晶面纳米压痕实验研究 | |
| 引用本文： | 郭晓光,张小冀,唐宪钊,郭东明,高航,滕晓辑. KDP晶体二倍频晶面纳米压痕实验研究[J]. 半导体学报, 2013, 34(3): 034001-5 |
| 作者姓名： | 郭晓光 张小冀 唐宪钊 郭东明 高航 滕晓辑 |
| 作者单位： | Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education,Dalian University of Technology |
| 基金项目： | 国家自然科学基金;省自然科学基金;其它 |
| 摘 要： | The nanohardness is from 1.44 to 2.61 GPa,the Vickers hardness is from 127 to 252 Vickers,and elastic modulus is from 52 to 123 GPa by the nanoindentation experiments on the doubler plane of KDP crystal. An indentation size effect is observed on the doubler plane in the test as the nanohardness and elastic modulus decreases with the increase of the maximum load.Slippage is identified as the major mode of plastic deformation, and pop-in events are attributed to the initiation of slippage.And the variation of unloading curve end is the result of stick effects between the indenter and the contact surface.The depth of the elastic deformation,which is between 40 and 75 nm,is responsible for the elastic deformation.The doubler plane of KDP crystal has anisotropy,and the relative anisotropy of nanohardness is 8.2%and the relative anisotropy of elastic modulus is 8.0%. |
| 关 键 词： | KDP crystal the doubler plane nanoindentation size effect anisotropy |
| 收稿时间： | 2012-08-08 |
| 修稿时间： | 2012-09-11 |
Nanoindentation on the doubler plane of KDP single crystal |
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| Guo Xiaoguang,Zhang Xiaoji,Tang Xianzhao,Guo Dongming,Gao Hang and Teng Xiaoji. Nanoindentation on the doubler plane of KDP single crystal[J]. Chinese Journal of Semiconductors, 2013, 34(3): 034001-5 | |
| Authors: | Guo Xiaoguang Zhang Xiaoji Tang Xianzhao Guo Dongming Gao Hang Teng Xiaoji |
| Affiliation: | Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116023, China |
| Abstract: | The nanohardness is from 1.44 to 2.61 GPa, the Vickers hardness is from 127 to 252 Vickers, and elastic modulus is from 52 to 123 GPa by the nanoindentation experiments on the doubler plane of KDP crystal. An indentation size effect is observed on the doubler plane in the test as the nanohardness and elastic modulus decreases with the increase of the maximum load. Slippage is identified as the major mode of plastic deformation, and pop-in events are attributed to the initiation of slippage. And the variation of unloading curve end is the result of stick effects between the indenter and the contact surface. The depth of the elastic deformation, which is between 40 and 75 nm, is responsible for the elastic deformation. The doubler plane of KDP crystal has anisotropy, and the relative anisotropy of nanohardness is 8.2% and the relative anisotropy of elastic modulus is 8.0%. |
| Keywords: | KDP crystal the doubler plane nanoindentation size effect anisotropy |
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