Shear-horizontal piezoelectric waves in an aluminum nitride film on a silicon substrate

The propagation of shear-horizontal waves in a piezoelectric film of aluminum nitride on a silicon substrate is studied. Three different electrode configurations are considered for thin film acoustic wave resonator application. A theoretical analysis is performed. The equations of linear piezoelectricity and anisotropic elasticity are used for the film and the substrate, respectively. Real and imaginary dispersion curves as well as electromechanical mode shapes are obtained. The effects of electrode configuration on the distribution of the electromechanical fields and the dispersion curves of long thickness-twist waves as well as energy trapping are examined.