| 纳米光学金刚石薄膜的分析与改进 |
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| 引用本文： | 胡广,王林军,祝雪丰,刘建民,黄健,徐金勇,夏义本.纳米光学金刚石薄膜的分析与改进[J].液晶与显示,2007,22(5):548-552. |
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| 作者姓名： | 胡广 王林军 祝雪丰 刘建民 黄健 徐金勇 夏义本 |
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| 作者单位： | 上海大学,材料科学与工程学院,上海,200072 |
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| 摘 要： | 由于极其优良的热学和光学性能,纳米金刚石薄膜极有可能应用于背投电视的激光光学窗口。文章通过在热丝辅助化学气相沉积法中采用偏压增强成核(BEN-HFCVD) ,成功地在(100)硅衬底上制得了适于作为光学窗口的高质量的光学级纳米金刚石薄膜,采用的偏压为-30 V。通过表征制备的纳米金刚石薄膜,发现它具有光滑的表面,表面均方根粗糙度(RMS)约为10 nm,并且对自支撑纳米金刚石薄膜进行透射光谱分析得到其透射率达到了50 %。
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| 关 键 词： | 纳米金刚石 光学性质 表面粗糙度 偏压增强成核-热丝辅助化学气相沉积法 |
| 文章编号： | 1007-2780（2007）05-0548-05 |
| 收稿时间： | 2007-04-17 |
| 修稿时间： | 2007-05-10 |
Enhancement and Analysis of Optical Nano-diamond Film |
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| HU Guang,WANG Lin-jun,ZHU Xue-feng,LIU Jian-min,HUANG Jian,XU Jin-yong,XIA Yi-ben.Enhancement and Analysis of Optical Nano-diamond Film[J].Chinese Journal of Liquid Crystals and Displays,2007,22(5):548-552. |
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| Authors: | HU Guang WANG Lin-jun ZHU Xue-feng LIU Jian-min HUANG Jian XU Jin-yong XIA Yi-ben |
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| Affiliation: | School of Materials Science and Engineering, Shanghai University,Shanghai 200072, China |
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| Abstract: | Owing to its extremely excellent thermal and optical properties, nano-diamond film is expected to be used as the laser optical window in the projection television (PJTV). In this work, high quality nano-crystalline diamond films for optical windows have been successfully prepared on (100) silicon substrates using bias enhanced nucleation hot filament chemical vapor deposition with 30 V negative bias voltage. It is found that the grown nano-diamond films have smooth surface with a root-mean-square surface roughness of ~10 nm, and the transmittance of free-standing nano-diamond film gets up to ~50 %. |
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| Keywords: | nano-diamond optical properties surface roughness bias enhanced nucleation hot filament chemical vapor deposition |
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