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| 径向剪切干涉仪系统的研制与校准研究 | |
| 引用本文： | 赵琦,蒋泽伟,何勇,卢峰. 径向剪切干涉仪系统的研制与校准研究[J]. 激光与光电子学进展, 2012, 0(4): 88-92 |
| 作者姓名： | 赵琦 蒋泽伟 何勇 卢峰 |
| 作者单位： | 西南技术物理研究所;南京理工大学电光学院;四川大学电子信息学院 |
| 摘 要： | 为了测量超长焦距高功率激光系统的波前畸变,研制并校准了基于空间相位调制的径向剪切干涉仪。仪器采用多波长设计,满足可见光和红外探测的需要。为研制并校准径向干涉仪,同哈特曼-夏克(HS)传感器、Zygo干涉仪进行了对比实验。通过实验与理论对比,得到径向剪切干涉仪参数的最佳值。研究了汉宁窗的取值范围和边缘截取值的合理范围,结果表明,校准后的径向剪切干涉仪能够准确测量,仪器的重复性和精度都能满足高精度波前探测要求。 |
| 关 键 词： | 光学测量 径向剪切干涉仪 实验研究 校准 |
Development and Calibration of a Radial-Shearing Interferometer |
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| Zhao Qi,Jiang Zewei,He Yong,Lu Feng. Development and Calibration of a Radial-Shearing Interferometer[J]. Laser & Optoelectronics Progress, 2012, 0(4): 88-92 | |
| Authors: | Zhao Qi Jiang Zewei He Yong Lu Feng |
| Affiliation: | 1 Southwest Institute of Technical Physics,Chengdu,Sichuan610041,China2 School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing,Jiangsu210094,China3 Department of Optoelectronics,Sichuan University,Chengdu,Sichuan610064,China |
| Abstract: | To measure the wavefront of high-power laser with ultra-long focal length,we develop and calibrate a shearing interferometer based on spatial phase modulation.It is experimentally compared with Hartmann-Shack(HS) wavefront sensor and Zygo interferometer.The results show that the shearing interferometer can meet the requirements of precisely measuring wavefront.It has high precision and good repetitiveness. |
| Keywords: | optical measurement radial-shearing interferometer experimental study calibration |
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