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溶胶-凝胶法制备Al3+掺杂ZnO薄膜的结构和光学性能
引用本文:宋立媛,唐利斌,姬荣斌,陈雪梅,刘新近,庄继胜,王茺,杨宇. 溶胶-凝胶法制备Al3+掺杂ZnO薄膜的结构和光学性能[J]. 红外技术, 2011, 33(2): 80-84
作者姓名:宋立媛  唐利斌  姬荣斌  陈雪梅  刘新近  庄继胜  王茺  杨宇
作者单位:1. 云南大学工程技术研究院,光电信息材料研究所,云南,昆明,650091;昆明物理研究所,云南,昆明,650223
2. 昆明物理研究所,云南,昆明,650223
3. 云南大学工程技术研究院,光电信息材料研究所,云南,昆明,650091
摘    要:采用无机盐溶胶-凝胶方法在载玻片衬底上制备了ZnO:Al薄膜,利用X射线衍射(XRD)、紫外-可见光透射光谱(UV-Vis transmittance spectrum)和扫描电镜(SEM)研究了退火温度和Al3+掺杂浓度对ZnO:Al薄膜结构和光学性能的影响.结果表明,随退火温度的升高或进行适当浓度的Al3+掺杂,可...

关 键 词:ZnO:Al薄膜  紫外-可见光透射光谱(UV-Vis transmittance spectrum)  扫描电镜(SEM)

Structural and Optical Properties of Aluminum-doped ZnO Thin Films Prepared by Sol-Gel Method
SONG Li-yuan,TANG Li-bin,JI Rong-bin,CHEN Xue-mei,LIU Xin-jin,ZHUANG Ji-sheng,WANG Chong,YANG Yu. Structural and Optical Properties of Aluminum-doped ZnO Thin Films Prepared by Sol-Gel Method[J]. Infrared Technology, 2011, 33(2): 80-84
Authors:SONG Li-yuan  TANG Li-bin  JI Rong-bin  CHEN Xue-mei  LIU Xin-jin  ZHUANG Ji-sheng  WANG Chong  YANG Yu
Affiliation:SONG Li-yuan1,2,TANG Li-bin2,JI Rong-bin2,CHEN Xue-mei1,LIU Xin-jin2,ZHUANG Ji-sheng2,WANG Chong1,YANG Yu1(1.Institute for Optoelectronic Materials,School of Engine & Technique,Yunnan University,Kunming 650091,2.Kunming Institute of Physics,Kunming 650223,China)
Abstract:ZnO:Al thin films were prepared on the glass substrates by the Sol-Gel method.The effects of different Al3+ dopant concentration and the annealing temperature on the structural and optical properties of ZnO:Al films were studied by using X-ray diffraction(XRD),UV-Vis transmittance spectrum and scanning electron microscope.The results indicated that the ZnO:Al thin films have a preferred c-axis(002) orientation perpendicular to the substrates.With increasing the annealing temperature or adding proper Al3+ do...
Keywords:ZnO:Al thin films  Uv-Vis transmittance  SEM  
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